High power impulse plasmas
Version vom 2. April 2012, 15:06 Uhr von Reicherz (Diskussion | Beiträge)
408 High power impulse plasmas for thin film deposition
The Electrostatic Quadrupole Plasma (EQP) Mass Spectrometer is an experimental instrument used to measure the ion energy distribution function of atoms and ions in the plasma and to perform the mass analysis of the plasma. In this practical course the student will investigate the ion energy distribution function (IEDF) of metal and Ar atoms in High power impulse magnetron sputtering (HIPIMS) plasma discharge.
