https://wiki.physik.ruhr-uni-bochum.de/fpsowas/index.php?action=history&feed=atom&title=High_power_impulse_plasmas 2026-04-14T23:58:32Z Versionsgeschichte dieser Seite in F-Praktikum SOWAS Wiki MediaWiki 1.30.0 https://wiki.physik.ruhr-uni-bochum.de/fpsowas/index.php?title=High_power_impulse_plasmas&diff=850&oldid=prev 2012-04-02T14:06:43Z

<p></p> <table class="diff diff-contentalign-left" data-mw="interface"> <col class="diff-marker" /> <col class="diff-content" /> <col class="diff-marker" /> <col class="diff-content" /> <tr style="vertical-align: top;" lang="de"> <td colspan="2" style="background-color: white; color:black; text-align: center;">← Nächstältere Version</td> <td colspan="2" style="background-color: white; color:black; text-align: center;">Version vom 2. April 2012, 14:06 Uhr</td> </tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l1" >Zeile 1:</td> <td colspan="2" class="diff-lineno">Zeile 1:</td></tr> <tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>'''408 <del class="diffchange diffchange-inline">OHigh </del>power impulse plasmas for thin film</div></td><td class='diff-marker'>+</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>'''408 <ins class="diffchange diffchange-inline">High </ins>power impulse plasmas for thin film deposition'''</div></td></tr> <tr><td class='diff-marker'>−</td><td style="color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>deposition'''</div></td><td colspan="2">&#160;</td></tr> <tr><td class='diff-marker'>&#160;</td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td><td class='diff-marker'>&#160;</td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"></td></tr> <tr><td class='diff-marker'>&#160;</td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>The Electrostatic Quadrupole Plasma (EQP) Mass Spectrometer is an experimental</div></td><td class='diff-marker'>&#160;</td><td style="background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;"><div>The Electrostatic Quadrupole Plasma (EQP) Mass Spectrometer is an experimental</div></td></tr> </table>

Reicherz https://wiki.physik.ruhr-uni-bochum.de/fpsowas/index.php?title=High_power_impulse_plasmas&diff=848&oldid=prev 2012-04-02T14:02:58Z

<p>Die Seite wurde neu angelegt: „&#039;&#039;&#039;408 OHigh power impulse plasmas for thin film deposition&#039;&#039;&#039; The Electrostatic Quadrupole Plasma (EQP) Mass Spectrometer is an experimental instrument used to ...“</p> <p><b>Neue Seite</b></p><div>'''408 OHigh power impulse plasmas for thin film<br /> deposition'''<br /> <br /> The Electrostatic Quadrupole Plasma (EQP) Mass Spectrometer is an experimental<br /> instrument used to measure the ion energy distribution function of atoms and ions in the plasma and to<br /> perform the mass analysis of the plasma. In this practical course the student will investigate the ion<br /> energy distribution function (IEDF) of metal and Ar atoms in High power impulse magnetron<br /> sputtering (HIPIMS) plasma discharge.<br /> <br /> <br /> [http://f-praktikum.ep1.rub.de/anleitung/Versuch408.pdf Anleitung]</div>

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